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IEEE
2019 IEEE International Ultrasonics Symposium (IUS);2019; ; ;
CMUT
Flexible
SU-8 polymer
Polyimide
Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers Integrated on Ultra-thin and Flexible Substrates
Ivano Lucarini
Luca Maiolo
Alessandro S. Savoia
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